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Cfi: Atomic Layer Etcher (Ale) System

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General Information

   May 22, 2026
   English
   Other
   published: May 22, 2026

Original Text

Basic Information



Reference Number


0000322767




Issuing Organization



University of Waterloo





Solicitation Type



RFP - Request for Proposal (Formal)




Solicitation Number



2026-RFPN-00502 CH




Title



CFI: Atomic Layer Etcher (ALE) System




Source ID



PU.AC.ON.220873.C18630




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